National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing
New Product Announcements
Process Cleaning, no author
The EPA is issuing amendments to the national emission standards for hazardous air pollutants (NESHAP) for semiconductor manufacturing. These amendments establish a new maximum achievable control technology floor level of control for existing and new combined hazardous air pollutants process vent streams containing inorganic and organic hazardous air pollutants and clarify the emission requirements for process vents by adding definitions for organic, inorganic and combined hazardous air pollutant process vent streams that contain both organic and inorganic hazardous air pollutant. This final rule was effective on July 22, 2008.
For more information, contact John Schaefer, Sector Policies and Programs Division, Office of Air Quality Planning and Standards, EPA, at (919) 541-0296.